System for handling substrate holders for vacuum coating
US4002141A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 26, 1975 |
| Grant date | Jan 11, 1977 |
| Priority date | — |
| Expiry date | Nov 26, 1995 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Mechanism for lifting a substrate holder from its carrier platform and rotating the holder during substrate coating, comprises a main assembly including a permanent magnet and concentric stripping ring, an actuating piston for lowering the assembly so that the magnet and stripping ring overlie a magnetic part of the substrate holder, and for raising the assembly with coupled magnet and holder above the carrier, a spring belt transmission for rotating the magnet and holder, an auxiliary actuating piston separately connected to the magnet within the main assembly whereby upon lowering of the main assembly with holder to the carrier platform after substrate rotation, the holder can be stripped from the magnet by independent vertical actuation of the magnet piston relative to the overlying stripping ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.