Patent · US Expired

Evaporation source

US4002880A · kind A · utility

4Cited by

4References

2Claims

0Family size

Assignee

GTE Sylvania Limited · US

Inventors

Ernest Davey · Raymond, US
Norman A. Mathieu · Exeter, US
Edward D. Parent · Hamilton, US

Key dates

Filing date	Aug 13, 1975
Grant date	Jan 11, 1977
Priority date	—
Expiry date	Aug 13, 1995

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/28
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

In an evaporation source for the vacuum deposition of sublimating material, the evaporant surrounds, and is spaced from, an axially disposed coiled tungsten heater. The evaporated material passes out of the source in an upward direction to deposit on a substrate located above the source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.