Electronically variable surface acoustic wave phase shifter
US4005376A · kind A · utility
6Cited by
6References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 15, 1976 |
| Grant date | Jan 25, 1977 |
| Priority date | — |
| Expiry date | Apr 15, 1996 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/68
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An electrically variable surface acoustic wave phase shifter including a strate upon which a piezoelectric layer is deposited and separated therefrom by an insulating layer. An electrode is deposited on the piezoelectric layer and on the bottom of the substrate with an electrical dc bias applied onto the electrodes which causes a charge accumulation or a depletion region at the silicon surface. This charge accumulation or depletion region causes the boundary conditions to change therefore causing a phase change in an acoustical wave propagating along the layered silicon surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.