Optical projection apparatus
US4011011A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1974 |
| Grant date | Mar 8, 1977 |
| Priority date | — |
| Expiry date | Dec 19, 1994 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A unity magnification catoptric image-forming system and an illumination system on the one hand, and an object- and image-surface supporting means on the other hand, are arranged for relative movement to retain the object and image surfaces in unity magnification conjugate planes of the catoptric system while effecting a scanning-type exposure of successive portions of the image surface to successively illuminated portions of the object. Fine motion mechanisms permit accurate preliminary adjustment of the object- and image-receiving surfaces relative to each other while under visual examination with the aid of the catoptric image-forming system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.