Scanning electron device
US4011450A · kind A · utility
7Cited by
1References
4Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 16, 1975 |
| Grant date | Mar 8, 1977 |
| Priority date | — |
| Expiry date | May 16, 1995 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24507
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron device having means for creating an electric field for directing secondary electrons to a detecting means comprising auxiliary electrodes and power supplies therefor so as to increase both the output signal intensity and contrast obtained by the electron detector. The field is created by two or more auxiliary electrodes, said specimen being located near the lowest potential electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.