Patent · US Expired

Etching apparatus for accurately making small holes in thick materials

US4013498A · kind A · utility

22Cited by
4References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 29, 1975
Grant dateMar 22, 1977
Priority date
Expiry dateSep 29, 1995

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2209/015
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A sheet of metallic material having a thickness T is covered on one side by an etchant resist and on the opposite side by an etchant resist and a removable shield. Etching is first performed on the side with only the etchant resist layer. Next, the shield is removed and the material is etched from both sides to produce an opening having a minimum dimension less than the thickness T of the material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.