Surface profile measuring device and method
US4017188A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 26, 1975 |
| Grant date | Apr 12, 1977 |
| Priority date | — |
| Expiry date | Feb 26, 1995 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An arrangement for measuring the profile of surfaces having a characteristic one-directional lay with sufficient resolution to determine the surface roughness thereof is disclosed, comprising a device for illuminating a small spot on the surface, with an image of the spot projected through an objective lens onto a large area light detector positioned to generate a signal corresponding to the total illumination produced by the image. The device also includes a second light detector which views a second image of the spot focused by the objective lens through a slit disposed perpendicularly to the direction of the surface lay. The respective detector signals are divided to produce signals corresponding to the ratio thereof, which, according to the present invention, correspond to the variations of the surface height occuring as the illuminated spot is scanned across the surface. A graphical profile of the surface may be obtained by recording these signals as a function of the scanned distance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.