Turbomolecular vacuum pump having a magnetic bearing-supported rotor

US4023920A · kind A · utility

Assignees

• Leybold-Heraeus GmbH & Co. KG · DE
• Societe de Propulsion-S.E.P. · FR

Inventors

• Werner Bachler · Rösrath, DE
• Rudiger Frank · Haigerloch, DE
• Helmut Habermann · Vernon, FR
• Maurice Brunet · Auxerre, FR

Key dates

• Filing date: Sep 26, 1974
• Grant date: May 17, 1977
• Expiry date: Sep 26, 1994

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16C2360/45
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A turbomolecular vacuum pump has a housing, a vertically oriented hollow pump rotor situated in the housing, and a vertically upwardly oriented stub shaft affixed to the housing and extending into the hollow pump rotor. The pump rotor is supported on the stub shaft by a magnetic axial bearing and at least one magnetic radial bearing, all disposed in the space surrounded by the hollow pump rotor.