Method for cool deposition of layers of materials onto a substrate
US4028206A · kind A · utility
8Cited by
5References
6Claims
0Family size
Inventor
Key dates
| Filing date | Mar 10, 1976 |
| Grant date | Jun 7, 1977 |
| Priority date | — |
| Expiry date | Mar 10, 1996 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/541
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In systems in which material is deposited on a substrate in such a way that substantial heating of the substrate by radiant transmission occurs, such heating is reduced by first depositing a material capable of reflecting a significant fraction of the incident thermal radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.