Wafer transport system
US4030622A · kind A · utility
31Cited by
6References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 1975 |
| Grant date | Jun 21, 1977 |
| Priority date | — |
| Expiry date | May 23, 1995 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An article handling system especially adapted for transporting thin, fragile articles such as silicon wafers into and out of a sealed environment such as a vacuum chamber comprises a vibratory track for transporting articles to be processed, an article handler associated with the track for removing articles from the track for processing and returning them to the track thereafter, and a pair of loader/unloaders at opposite ends of the track for intermittently supplying articles to be processed to the track and removing them therefrom after processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.