Ratio detector
US4037161A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 3, 1975 |
| Grant date | Jul 19, 1977 |
| Priority date | — |
| Expiry date | Dec 3, 1995 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/36
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electro-optical device for generating data signals representing relative displacement between an aperture pattern in a reference plane and a reflective pattern in a measurement plane comprises a reference detector for sensing reference radiation directed towards the aperture pattern and a convolution detector for sensing the reference radiation reflected by the reflective pattern. The phase of a signal generated by the convolution detector is compared to the phase of a signal generated by the reference detector for generating the data signals defining the relative displacement between the aperture pattern and the reflective pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.