Etchants for glass films on metal substrates
US4040897A · kind A · utility
25Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 1976 |
| Grant date | Aug 9, 1977 |
| Priority date | — |
| Expiry date | Nov 10, 1996 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31111
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An aqueous solution for etching a glass layer on a metal (aluminum) substrate without substantial attack on the metal. The solution comprises buffered hydrofluoric acid, sodium chloride, and either (a) a fluorocarbon surfactant capable of forming a protective thin film upon the aluminum, or (b) a 6-hydroxy alcohol (e.g., mannitol or sorbitol).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.