Substrate transfer apparatus for a vacuum coating system
US4042128A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 26, 1975 |
| Grant date | Aug 16, 1977 |
| Priority date | — |
| Expiry date | Nov 26, 1995 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Substrate transfer apparatus for a vacuum coating or processing system of the multiple compartment type, comprising a rectangular platform for carrying substrates to be coated, the platform being moveable through the compartments over and between supporting and guide rollers respectively, and having a gear rack on one side extending in the direction of motion, and driving means for the platform including an electric variable speed d.c. motor connected respectively, through individual one-way running clutches to a plurality of pinion gears, each pinion gear being independently biased for separately meshing with the rack, and limit switches positioned within the compartments and operable by the platform for controlling the electric motor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.