Patent · US Expired

Method of making a reticle-lens

US4042449A · kind A · utility

4Cited by
4References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 20, 1976
Grant dateAug 16, 1977
Priority date
Expiry dateSep 20, 1996

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B1/115
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method of producing an optical reticle and the reticle produced thereby. thin layer of aluminum is deposited on the face of a sapphire substrate and a reticle pattern is chemically etched therein. The system is then exposed to air at an elevated temperature for approximately one hour to oxidize the remaining aluminum layer. A film of titanium is next placed over the rough aluminum oxide as by sputtering, for example, and the excess titanium is etched away by the same pattern to produce the finished reticle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.