Defect inspection of objects such as electronic circuits
US4056716A · kind A · utility
54Cited by
10References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 1976 |
| Grant date | Nov 1, 1977 |
| Priority date | — |
| Expiry date | Jun 30, 1996 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B39/083
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Successive areas of a high-resolution object image are compared with corresponding areas of a low-resolution master pattern to produce signals representing the quality of the object. Comparison is effected by detecting which of a set of features occurs in each area of the object image, detecting which feature of the same set occurs in a larger area of the master pattern, and determining whether these two features are the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.