Scanning apparatus, for producing masks for micro circuits
US4060816A · kind A · utility
1Cited by
5References
3Claims
0Family size
Inventor
Key dates
| Filing date | Feb 9, 1976 |
| Grant date | Nov 29, 1977 |
| Priority date | — |
| Expiry date | Feb 9, 1996 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning device for providing rapid accurate mechanical line scanning of a preferably flat surface includes a radiation source, a radiation sensitive medium and apparatus for providing relative movement between the radiation source and the medium. The apparatus includes a driving device and a slide structure which is designed to oscillate at substantially its self resonant frequency in order to increase accuracy of operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.