Krypton fluoride excimer laser utilizing nitrogen trifluoride as a fluorine donor
US4063192A · kind A · utility
2Cited by
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5Claims
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Key dates
| Filing date | Jun 7, 1976 |
| Grant date | Dec 13, 1977 |
| Priority date | — |
| Expiry date | Jun 7, 1996 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser using an electron beam pump mixture of argon, krypton and nitrogen trifluoride. High power krypton fluoride laser emission is efficiently generated by employing nitrogen trifluoride as a fluorine donor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.