Activated gas reaction apparatus & method
US4065369A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1976 |
| Grant date | Dec 27, 1977 |
| Priority date | — |
| Expiry date | Jul 15, 1996 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/1227
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An activated gas reaction apparatus which comprises an activation chamber; feeding means for conducting feed gas into the activation chamber; microwave power-generating means for activating raw gas received in the activation chamber; and a reaction chamber provided apart from the activation chamber for reaction of activated gas, the activated gas reaction apparatus so constructed as to satisfy the following formula: EQU 2.pi.fpl .gtoreq. 4 .times. 10.sup.9 where PA1 f = frequency (Hz) of microwaves PA1 p = gas pressure (torr) in the activation chamber PA1 L = length (cm) of the activation chamber extending in the direction in which the electromagnetic field provided by the microwave source is applied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.