Method of fabrication of a charge-coupled device

US4065847A · kind A · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Joseph Borel · Échirolles, FR
• Jacques Lacour · Grenoble, FR
• Gerard Merckel · Grenoble, FR

Key dates

• Filing date: Aug 30, 1976
• Grant date: Jan 3, 1978
• Expiry date: Aug 30, 1996

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/981

Abstract

The fabrication of a charge-coupled device consists in forming an insulating layer in the form of a periodic series of insulating steps, in depositing a metallic layer on alternate steps so as to form electrodes, in implanting regions doped with a type opposite to the substrate into the surface of the semiconductor by directing an ion beam through the insulating steps of small thickness which are transparent to the beam, and in connecting each electrode to a control line.