Patent · US Expired

Process for fabrication of dielectric optical waveguide devices

US4071383A · kind A · utility

21Cited by
9References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 11, 1976
Grant dateJan 31, 1978
Priority date
Expiry dateMay 11, 1996

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/925
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

The present invention discloses a process for fabrication of dielectric optical waveguide devices by utilizing selective epitaxial growth. Concentrated energy such as an electron or laser beam is focused on a predetermined region on the surface of a substrate during the epitaxial growth with the application of molecular beams so that the mixed crystal grown in the irradiated region may have a chemical composition different from that of the mixed crystal grown on the non-irradiated region. Since this process permits to overlaying the embedded waveguides one upon another, complex optical waveguide devices can be fabricated in a simple manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.