Apparatus for interferometrically measuring the physical properties of test object
US4072422A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1976 |
| Grant date | Feb 7, 1978 |
| Priority date | — |
| Expiry date | Oct 20, 1996 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0675
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This disclosure describes an apparatus for interferometrically measuring the physical properties of test object in which a test object having at least two surfaces and a substantial thickness is illuminated by a source of broadband light beam, each of plural wave fronts then formed and having an optical path difference therebetween is split by the transmission of the light beam or by the reflection of the light beam thereby, the split wave fronts are superposed each other respectively to form broadband light interference fringes and the physical properties such as thickness and refractive index of the test object are measured from the broadband light interference fringes, and which is especially provided with means for forming broadband light interference fringe by superposing the split wave fronts tilted to each other, while forming an image of said test object in the position where said interference fringe is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.