Photoelectric grating displacement measuring apparatus
US4079252A · kind A · utility
32Cited by
5References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 20, 1976 |
| Grant date | Mar 14, 1978 |
| Priority date | — |
| Expiry date | Aug 20, 1996 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measuring system includes a scale grating carried on one of two relatively movable bodies and an index grating carried on the other. The scale grating is illuminated directly in such a way that light passing from it to the index grating is at least partially diffuse. Detector means are provided to respond to the resulting spatially periodic distribution of illumination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.