Removal of thin films from substrates by laser induced explosion
US4081653A · kind A · utility
52Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1976 |
| Grant date | Mar 28, 1978 |
| Priority date | — |
| Expiry date | Dec 27, 1996 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/94
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Selected portions of a thin film coating of metal are removed from an insulative substrate by directing a coherent beam of light energy from a laser at the coating, to heat the coating and cause the evaporation and entrapment of the substrate material at the coating-substrate interface. A positive pressure builds up at the interface resulting in an explosion which removes the coating material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.