Capacitive pressure sensing device
US4084438A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 1976 |
| Grant date | Apr 18, 1978 |
| Priority date | — |
| Expiry date | Mar 29, 1996 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensing device and method of construction therefor. The device includes at least two dielectric discs which are fused together at their peripheral boundary to form a hollow monolithic capsule having two nominally planar opposed inner surfaces. The opposed inner surfaces of the capsule are mutually separated by a uniform gap near the peripheral boundary and by a distance related to the difference in pressure interior and exterior to the capsule otherwise. Conductive films are disposed on opposed portions of the inner surfaces of the capsule. The device further includes a means for electrically coupling each of the conductive films to an associated terminal exterior to the capsule. The capacitance between these terminals is related to the above-mentioned pressure differential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.