Vacuum pumping system and method of use
US4088456A · kind A · utility
22Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 1975 |
| Grant date | May 9, 1978 |
| Priority date | — |
| Expiry date | Jan 7, 1995 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/02
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A means for connecting a vacuum pump to a chamber to be evacuated comprises an outer wall of low gas permeability and a gas sorptive means substantially coextensive with the inner surface of said outer wall.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.