Method and apparatus for analyzing trace components using a cryopumpable reagent gas
US4091655A · kind A · utility
4Cited by
4References
5Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 25, 1977 |
| Grant date | May 30, 1978 |
| Priority date | — |
| Expiry date | Apr 25, 1997 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0422
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of analyzing a trace gas, in which the trace gas is transported in a carrier gas stream into a reaction chamber where the trace gas is ionized. The carrier gas includes or is a reagent gas which is ionized in the reaction chamber and the ions of which in turn form trace gas ions. The carrier gas, which is cryopumpable, is then injected with the trace gas ions into a vacuum chamber, the walls of which are cooled to cryopump the reagent gas and thus strip it away from the trace gas ions. The trace gas ions are focussed into an analyzer and analyzed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.