Apparatus for washing semiconductor wafers
US4092176A · kind A · utility
87Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 1976 |
| Grant date | May 30, 1978 |
| Priority date | — |
| Expiry date | Dec 7, 1996 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for washing semiconductor wafers is disclosed which comprises a washing tub, a basket holding semiconductor wafers to be washed and placed in the washing tub, nozzles provided above and below the basket respectively for constantly squirting a washing liquid over the wafers, and a vent provided below the basket for periodically draining the waste liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.