Variable area capacitive pressure transducer with temperature compensation
US4092696A · kind A · utility
18Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1976 |
| Grant date | May 30, 1978 |
| Priority date | — |
| Expiry date | Dec 27, 1996 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A variable area capacitive transducer has two electrodes, and the surface of one electrode is treated to provide it with a thin-film dielectric layer. One of the two electrodes has an apex point nearer the other electrode than the remainder of the electrode surface. As a force is applied to the deformable one of the two electrodes, there is a change in the effective contact area between the electrodes and a resultant change in capacitance. An electrical circuit is disclosed for translating this capacitance change into a d-c voltage change. Temperature compensation is provided for the transducer assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.