Electron microscopy coating apparatus and methods
US4096055A · kind A · utility
Inventor
Key dates
| Filing date | Dec 29, 1976 |
| Grant date | Jun 20, 1978 |
| Priority date | — |
| Expiry date | Dec 29, 1996 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electron microscopy coating apparatus and coating methods incorporate a specimen mounting arrangement which is used both for coating specimens which are to be viewed by scanning electron microscopy (SEM) and for coating specimens which are to be viewed by transmitted electron microscopy (TEM) and for coating specimens for the recently developed scanning-transmitted electron microscopy (STEM). The coating apparatus and method includes a hood and a mixer disc for coating by cold cathode sputtering and can also be used (with arc type electrodes in place of the hood and mixer disc) for coating by either charged ion evaporation or straight film evaporation. A biasing direct current provides a differential charge for cold cathode sputtering and charged ion evaporation. For charged ion evaporation the negative lead of the direct current is connected to one electrode of the evaporator and the positive lead of the direct current is connected to the base to provide a differential charge (a negative charge on the evaporated ion and a positive charge on the specimen) to attract the evaporated ions to the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.