Etching liquid for etching aluminum
US4097394A · kind A · utility
6Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1977 |
| Grant date | Jun 27, 1978 |
| Priority date | — |
| Expiry date | May 2, 1997 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Etching liquid for selectively etching aluminum and alloys, which consists of a solution of carbonate and/or hydroxide, phosphate and ferricyanide. This etching liquid gives products having very good boundary resolution and little undercutting.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.