Susceptor for heating semiconductor substrates
US4099041A · kind A · utility
314Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 1977 |
| Grant date | Jul 4, 1978 |
| Priority date | — |
| Expiry date | Apr 11, 1997 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/105
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An integral graphite susceptor of the type comprising a hollow polyhedron, adapted to support a semiconductor substrate on an outer planar surface of a wall thereof, has a recessed cavity adjacent the inner surface of the wall and shaped so that the floor of the cavity is parallel to the outer planar surface. The cavity may comprise an oblong-shaped slot machined into the wall of the susceptor, which is typically a hollow truncated pyramid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.