Process for the purification of silane
US4099936A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 16, 1976 |
| Grant date | Jul 11, 1978 |
| Priority date | — |
| Expiry date | Dec 16, 1996 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/046
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process for the purification of a mixture of silane and impurities comprising passing the mixture through a succession of zones connected in series, in a closed system, according to the following steps: (a) passing the mixture, in gaseous form, through a zone containing porous, granular charcoal as an adsorbent at a temperature in the range of about minus 40.degree. C to about minus 80.degree. C to provide a mixture of silane and remaining impurities in gaseous form; (b) passing the gaseous mixture from step (a) through a zone containing porous, granular magnesium silicate as a adsorbent at a temperature in the range of about minus 40.degree. C to about minus 80.degree. C to provide a mixture of silane and remaining impurities in gaseous form; (c) passing the gaseous mixture from step (b) into a distillation zone in such a manner that the impurities are removed overhead in gaseous form and at least about 95 per cent by weight of the silane is converted to liquid bottoms; and PA1 (d) recovering the bottoms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.