Metal oxide coatings
US4102768A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 1977 |
| Grant date | Jul 25, 1978 |
| Priority date | — |
| Expiry date | Oct 26, 1997 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/155
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus are disclosed for depositing transparent electrically-conductive metal oxide coatings or films, e.g. of indium/tin oxides, on non-conducting substrates, such as glass. The substrate may be a windscreen or window for an aircraft, on which the film provides an electrical resistance heating means for de-misting or de-icing. The film is reactively sputtered from a cathode assembly formed of substantially parallel strips of the metal, which is oscillated back and forth in a direction perpendicular to the length of the strips and substantially parallel to the substrate. Control of the thickness of the deposited film over the area of the substrate, e.g. for producing uniform heating over an irregular coated area of the substrate, is effected by bringing different effective areas of the cathode assembly over different parts of the substrate, by masking the cathode strips or by using a series of cathode strips which are tapered or which differ in width from one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.