Solid electrolyte thin film oxygen sensor having thin film heater
US4107019A · kind A · utility
56Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 1977 |
| Grant date | Aug 15, 1978 |
| Priority date | — |
| Expiry date | Oct 13, 1997 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4067
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An oxygen sensor made up of an oxygen concentration cell which as a stratiform structure and includes a thin film of an oxygen ion conductive solid electrolyte and a thin layer of a material serving as the source of a reference oxygen partial pressure such as a Ni-NiO system, an electrically nonconductive base plate which supports thereon the cell, and a thin metal layer embedded in the base plate as a resistance heating element for heating the solid electrolyte film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.