Patent · US Expired

Electron beam vaporizer

US4115653A · kind A · utility

5Cited by

2References

5Claims

0Family size

Assignee

Leybold-Heraeus GmbH & Co. KG · DE

Inventors

Gerhard Kienel · Hanau, DE
Helmut Petersein · Gelnhausen, DE

Key dates

Filing date	Oct 4, 1976
Grant date	Sep 19, 1978
Priority date	—
Expiry date	Oct 4, 1996

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/30
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Electron beam vaporizer having a beam generator with a heated cathode, focusing means and electromagnetic deflection means for the deflection and guidance of the beam. An exchangeable, fluid-cooled and preferably rotatable vaporizing crucible associated with the beam generator and having at least one depression in the base thereof for at least one substance to be vaporized. The crucible has passages for the flow of a coolant beneath the depression and the base of the vaporizing crucible is constructed as separate components having a common contact surface so that a removable crucible head is formed. The crucible base is closed off from its environment with regard to the flow passages.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.