Air bearing vacuum seal assembly
US4118042A · kind A · utility
24Cited by
6References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 27, 1977 |
| Grant date | Oct 3, 1978 |
| Priority date | — |
| Expiry date | Sep 27, 1997 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S277/913
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An air bearing vacuum seal assembly capable of rotating at the speed of several thousand revolutions per minute using an air cushion to prevent the rotating and stationary parts from touching, and a two stage differential pumping arrangement to maintain the pressure gradient between the air cushion and the vacuum so that the leak rate into the vacuum is, for example, less than 1 .times. 10.sup.-4 Pa m.sup.3 /s. The air bearing vacuum seal has particular application for mounting rotating targets to an evacuated accelerator beam tube for bombardment of the targets with high-power charged particle beams in vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.