Patent · US Expired

Cryopump having improved heat radiation shielding

US4121430A · kind A · utility

16Cited by

2References

9Claims

0Family size

Assignee

Leybold-Heraeus GmbH & Co. KG · DE

Inventors

Werner Bachler · Rösrath, DE
Hans-Joachim Forth · Neunburg vorm Wald, DE
Rudiger Frank · Haigerloch, DE

Key dates

Filing date	May 4, 1977
Grant date	Oct 24, 1978
Priority date	—
Expiry date	May 4, 1997

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S417/901
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A cryopump having a generally axially symmetrical housing provided at one end with an entrance opening defined by a plane for passage of molecules of the gas to be pumped and plates defining condensation surfaces arranged to be brought to low temperature for condensation of molecules of the gas to be pumped, and a thermal radiation shield disposed in the region of the entrance opening, with the condensation surfaces being oriented substantially at right angles to the plane of the entrance opening and the radiation shield being composed of a plurality of elongate metal strips so positioned that their longitudinal axes are parallel to the condensation surfaces.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.