Device for measuring thermal parameters
US4123938A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 1976 |
| Grant date | Nov 7, 1978 |
| Priority date | — |
| Expiry date | May 19, 1996 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K17/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring temperature or, alternatively, for measuring the flow of thermal power to a substrate maintained at substantially constant temperature. In accordance with the invention there is provided a semiconductor substrate, such as a silicon substrate. A temperature sensing means is formed in the substrate and is operative to generate a first electrical signal as a function of the temperature of the substrate. Means are provided for generating a reference level, and a comparator is reponsive to the first electrical signal and the reference level for generating a control signal. A heater means is formed in the substrate and means are provided for driving the heater means in response to the control signal. Finally, means are provided for measuring the electrical power input to the heater. The measured electrical power input is, in various applications, a useful indication of the temperature of the ambient environment. In a preferred embodiment of the invention, the temperature sensing means comprises a PN junction in said substrate, and the voltage drop across this junction is used to develop the first electrical signal. In this embodiment, the heater means comprises…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.