Process for the manufacture of trichlorosilane and silicon tetrachloride
US4130632A · kind A · utility
14Cited by
1References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 1977 |
| Grant date | Dec 19, 1978 |
| Priority date | — |
| Expiry date | May 10, 1997 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/107
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Trichlorosilane or silicon tetrachloride is prepared by reacting metallic uminum-containing silicon in a reaction zone with hydrogen chloride or chlorine at a temperature between about 260.degree. and about 1200.degree. C, the reaction gas is then cooled to 40.degree. to 130.degree. in a cooling zone through which the velocity of flow is maintained at between 3 and 30 meters per second, and finally filtered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.