Integral resonant support arms for piezoelectric microresonators
US4139793A · kind A · utility
18Cited by
5References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 5, 1977 |
| Grant date | Feb 13, 1979 |
| Priority date | — |
| Expiry date | Aug 5, 1997 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/0595
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Piezoelectric microresonators with suspension arms, oscillating according to a vibration resulting from the superposition of a principal extensional mode of oscillation, of a first shear coupled mode of oscillation and of a second extensional coupled mode of oscillation. The suspension arms are attached to the active part of the resonator in a place which is the intersection of a nodal plane of the vibration resulting of the superposition of the principal mode and of the first coupled mode of oscillation. The other end of the arms is fixed on a stiff support in a location which coincide with a node of their vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.