Process for selective etching of polymeric materials embodying silicones therein
US4140572A · kind A · utility
11Cited by
12References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 7, 1976 |
| Grant date | Feb 20, 1979 |
| Priority date | — |
| Expiry date | Sep 7, 1996 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/95
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Titanium is employed as a masking material for the selective etching of a coating material of a polyimide-silicone copolymer disposed on selective surface areas of electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.