Melt-formed polycrystalline ceramics and dopant hosts containing phosphorus
US4141738A · kind A · utility
11Cited by
4References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 16, 1978 |
| Grant date | Feb 27, 1979 |
| Priority date | — |
| Expiry date | Mar 16, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/2225
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Disclosed are new polycrystalline ceramic bodies formed from melts containing as essential components P.sub.2 O.sub.5, Ta.sub.2 O.sub.3 and Al.sub.2 O.sub.3 and sometimes containing small amounts of SiO.sub.2. Also disclosed are such bodies in the form of planar dopant hosts for doping silicon or germanium with phosphorus. Methods of making both products are disclosed as well as how to use the dopant hosts in a doping process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.