Focusing ion accelerator
US4149055A · kind A · utility
5Cited by
3References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1977 |
| Grant date | Apr 10, 1979 |
| Priority date | — |
| Expiry date | May 2, 1997 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high current ion beam is extracted from an ion plasma by a low perveance ion optical system including a screen electrode, a final electrode and an intermediate electrode therebetween which is shaped to correspond to the extraction voltage equipotentials therebetween. By controlling the voltage of the intermediate electrode with respect to the other two electrodes focusing is accomplished.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.