Cryopumping method and apparatus
US4150549A · kind A · utility
25Cited by
10References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 16, 1977 |
| Grant date | Apr 24, 1979 |
| Priority date | — |
| Expiry date | May 16, 1997 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/15
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Cryopumping speed of nitrogen, helium, hydrogen and neon can be increased by omitting the chevron baffle in a conventional cryopump and preventing incident radiation of about 300.degree. K. from striking surfaces used to cryosorb helium, hydrogen and neon. An apparatus is disclosed utilizing three pumping surfaces created from open ended opposed nested cylinders. A radiation absorbent coating is placed on one of the surfaces to shield the helium, hydrogen and neon pumping surface. Refrigeration can be provided by a two-stage closed cycle cryogenic refrigerator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.