Semiconductor transducer
US4151502A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 1977 |
| Grant date | Apr 24, 1979 |
| Priority date | — |
| Expiry date | Apr 15, 1997 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor transducer comprises a semiconductor strain gauge composed of a mono-crystalline semiconducting material and a strain sensing region formed in a first main surface of the mono-crystalline semiconducting material, and a strain measuring member coupled to the semiconductor strain gauge through an alloy material. An electrical insulating layer is attached to a second main surface of the mono-crystalline semiconducting material which is coupled to the strain measuring member through the alloy material. The insulating layer is extended to a side surface of the mono-crystalline semiconducting material thereby to cover the same side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.