Capacitive pressure transducer
US4151578A · kind A · utility
46Cited by
5References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 1, 1977 |
| Grant date | Apr 24, 1979 |
| Priority date | — |
| Expiry date | Aug 1, 1997 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure transducer including a pair of electrically insulative elastic diaphragms disposed adjacent each other and bonded together in a spaced apart relationship to form a sealed cavity, a conductive layer applied to the inside surface of each of the diaphragms and a small absolute pressure provided in the cavity. This small absolute pressure cavity essentially reduces the effects of the negative temperature coefficient of the modulus of elasticity of the diaphragms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.