High-resolution, cryogenic, side-entry type specimen stage
US4162401A · kind A · utility
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Key dates
| Filing date | May 17, 1978 |
| Grant date | Jul 24, 1979 |
| Priority date | — |
| Expiry date | May 17, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high-resolution, cryogenic side-entry type specimen stage includes a copper block within which a specimen can be positioned in the electron beam of an electron microscope, one end of the copper block constituting a specimen heat exchanger, means for directing a flow of helium at cryogenic temperature into the heat exchanger, and electrical leads running from the specimen to the exterior of the microscope for four point D.C. electrical resistivity measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.