Separated ion source
US4163151A · kind A · utility
36Cited by
3References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1977 |
| Grant date | Jul 31, 1979 |
| Priority date | — |
| Expiry date | Dec 28, 1997 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/288
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The separated ion source combines an ion source and a magnetic mass separator within a single magnetic field geometry. The preferred ion source has a low voltage Penning discharge configuration and produces a charged particle beam in the form of a ribbon with a rectangular cross section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.