Semiconductor pressure converter
US4168630A · kind A · utility
22Cited by
0References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 1977 |
| Grant date | Sep 25, 1979 |
| Priority date | — |
| Expiry date | Nov 22, 1997 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor pressure converter includes a silicon pressure sensing element, a silicon base hermetically attached to the sensing element to bear the element and a metal pipe connected to the silicon base so as to introduce a pressure to the sensing element through the silicon base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.