Method and apparatus for laser zone melting
US4177372A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 1977 |
| Grant date | Dec 4, 1979 |
| Priority date | — |
| Expiry date | May 24, 1997 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/09
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for laser zone melting and apparatuses therefor wherein, in a zone melting method for a thin film due to the irradiation of laser beam, the laser beam is vibrated at the frequency of more than 1 Hz in the direction substantially perpendicular to the moving direction of a melting zone and the fluctuation of laser beam output is controlled to less than 1%. The zone-melted thin films manufactured by this method have good electrical properties resulting from less crystal imperfection, less non-stoichiometric excess atoms of the constituents, and less thickness corrugation of the film due to the suppression of temperature fluctuations and its spacial inhomogeneity at the time of zone melting.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.